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A self-aligned vertical comb-drive actuator using surface micromachining for scanning micromirrors

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4 Author(s)
Dooyoung Hah ; Basic Res. Lab., Electron. & Telecommun. Res. Inst., Daejeon, South Korea ; Chang-Auck Choi ; Chi-Hoon Jun ; Youn Tae Kim

A self-aligned vertical comb-drive actuator fabricated using surface micromachining is presented. One- and two-axis tilt scanning micromirrors with the actuators were fabricated and tested. A mechanical tilt angle of ±1.4° at 66 VDC was achieved for a 1-mm-diameter micromirror.

Published in:

Optical MEMS, 2003 IEEE/LEOS International Conference on

Date of Conference:

18-21 Aug. 2003