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Fabrication of optical MEMS switches having multilevel mirror-drive electrodes

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10 Author(s)
Ishii, H. ; NTT Microsystem Integration Labs., NTT Corp., Kanagawa, Japan ; Tanabe, Y. ; Shimamura, T. ; Yamaguchi, J.
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The aim of this work is to show the effective way for the formation of optical MEMS switches by applying seamless integration technology (SeaiT) as a first step toward LSI integration. The fabrication process of the optical MEMS switches in this work consisted of electrode fabrication, mirror fabrication, and packaging. A 6-inch-diameter bulk-Si and SOI wafers are used for the fabrication of electrodes and mirrors, respectively.

Published in:

Optical MEMS, 2003 IEEE/LEOS International Conference on

Date of Conference:

18-21 Aug. 2003