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Fabrication and some measurement of a digital variable optical attenuator

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6 Author(s)
Sun, W. ; Inst. of Microtechnol., Neuchatel Univ., Switzerland ; Munghal, M.J. ; Noell, W. ; Perez, F.
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Arrays of sixteen micromirrors featuring 1 μm-wide structures have been fabricated based on SOI technology. Assembled prototypes can be actuated at about 70 V. Tilt angles, surface flatness, and some optical data of certain mirrors are measured.

Published in:

Optical MEMS, 2003 IEEE/LEOS International Conference on

Date of Conference:

18-21 Aug. 2003