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Cascaded micromirror pair driven by angular vertical combs for two-axis scanning

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5 Author(s)
Fujino, M. ; Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA ; Patterson, P.R. ; Nguyen, H. ; Piyawattanametha, W.
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Monolithically cascaded one-axis micromirrors driven by angular vertical combs are designed and fabricated. Using "W"-shape ray optics, we demonstrate two-axis scanning covering ±6.0° two-dimensional area at resonant modes: 7.5 kHz, ±17 V in fast-scanning mirror, 1.2 kHz, ±7 V in slow-scanning mirror.

Published in:

Optical MEMS, 2003 IEEE/LEOS International Conference on

Date of Conference:

18-21 Aug. 2003