Cart (Loading....) | Create Account
Close category search window

Vertical comb drive actuator constructed by buckled bridges in SOI-MEMS

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
Sasaki, M. ; Dept. of Machine Intelligence & Syst. Eng., Tohoku Univ., Sendai, Japan ; Briand, D. ; Noell, W. ; de Rooij, N.

Vertical comb drive actuators are now frequently used for rotating micromirrors. For constructing the vertical comb, paired combs positioned at different heights are necessary. In many cases, Si dry etching is carried out from front and bottom surfaces of SOI wafer. The alignment accuracy between combs depends on the aligner accuracy. The backside Si etching becomes very deep with the increase of technical difficulty. In this study, a new method for realizing the vertical comb in SOI-MEMS and its performance is examined.

Published in:

Optical MEMS, 2003 IEEE/LEOS International Conference on

Date of Conference:

18-21 Aug. 2003

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.