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Nonlinear torque compensation of comb-driven micromirror

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9 Author(s)
Y. Sakai ; Fujitsu Labs. Ltd., Atsugi, Japan ; T. Yamabana ; S. Ide ; K. Mori
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We achieved high-speed (i.e., less than 1 ms) angle response without resonance by applying the nonlinear torque compensation of a comb-driven micromirror to a feed-forward controller.

Published in:

Optical MEMS, 2003 IEEE/LEOS International Conference on

Date of Conference:

18-21 Aug. 2003