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Crystalline Si-based in-plane tunable Fabry-Perot filter with wide tunable range

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3 Author(s)
Sung-Sik Yun ; Dept. of Mechatronics, K-JIST, Gwangju, South Korea ; Kyoung-Woo Jo ; Jong-Hyun Lee

This paper presents crystalline Si-based tunable Fabry-Perot filter, which enables its integration to align with other optical devices on an in-plane substrate. This device features wide tuning range over 80 nm and high tuning sensitivity of 11.7 nm/V.

Published in:

Optical MEMS, 2003 IEEE/LEOS International Conference on

Date of Conference:

18-21 Aug. 2003