Referenced Items are not available for this document.
We report on strategies to form polymer microstructures on patterned substrates using the hydrophobic effect for fabrication of optical microsystems. We compare three different liquid phase dewetting methods by the example of microlens arrays.
Published in:
Optical MEMS, 2003 IEEE/LEOS International Conference on
Date of Conference: 18-21 Aug. 2003
- Page(s):
- 69 - 70
- Print ISBN:
- 0-7803-7830-X
- INSPEC Accession Number:
- 7970739
- Digital Object Identifier :
- 10.1109/OMEMS.2003.1233471
- Product Type:
- Conference Publications
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