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Constructing optical microsystems based on the hydrophobic effect: comparison of microlens arrays fabricated by different methods

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3 Author(s)
Zimmer, F. ; Inst. for Microsystem Technol., Freiburg Univ., Freiberg, Germany ; Moench, W. ; Zappe, H.

We report on strategies to form polymer microstructures on patterned substrates using the hydrophobic effect for fabrication of optical microsystems. We compare three different liquid phase dewetting methods by the example of microlens arrays.

Published in:

Optical MEMS, 2003 IEEE/LEOS International Conference on

Date of Conference:

18-21 Aug. 2003