Skip to Main Content
Investigation of our bulk-micromachined resonant micro MEMS-scanner revealed that the eigen-frequency of 250 Hz varied within a range of only 0.1% during a temperature cycle between 10°C and 60°C at ambient atmosphere. Results of the study show that packaging is crucial.
Optical MEMS, 2003 IEEE/LEOS International Conference on
Date of Conference: 18-21 Aug. 2003