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Replicated optical MEMS in sol-gel materials

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3 Author(s)
Gale, Michael T. ; Centre Suisse d''Electronique et de Microtechnique SA, Zurich, Switzerland ; Obi, S. ; de Rooij, N.

Replication technology using sol-gel materials offers an interesting alternative to the current approach to optical MEMS fabricated in silicon using lithographic and micro-machining technologies. The use of UV-curable sol-gel materials enables optical features such as micro-lenses and diffractive optical elements to be fabricated in the same process step as the MEMS structures, and has the potential of low-cost, high resolution mass-production technology. The paper describes progress in work aimed at investigating the potential of this approach.

Published in:

Optical MEMS, 2003 IEEE/LEOS International Conference on

Date of Conference:

18-21 Aug. 2003

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