Fabrication of micropump with spiral-type magnetic micromachine

The micropump with spiral-type magnetic micromachine was examined by experiment and analysis. In the experiment, when the magnetic field was applied only around the micromachine, the micromachine was fixed and rotated by the magnetic field gradient. This mechanism generated the pressure. The analysis was carried out with three-dimensional analysis. As a result, the analysis result agreed with the experimental one, and the maximum pressure produced by the 1-mm /spl phi/ pump was 70 Pa. Therefore, this micropump could be used for application in very low Reynolds number conditions.