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Thin-film inductor for gigahertz band with CoFeSiO-SiO2 multilayer granular films and its application for power amplifier module

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6 Author(s)
Ikeda, K. ; R&D Center, Taiyo Yuden Co. Ltd., Gunma, Japan ; Kobayashi, K. ; Ohta, K. ; Kondo, R.
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The thin-film power amplifier module for wide-band code division multiple access was designed and fabricated using the magnetic thin film as magnetic core of choke inductors. CoFeSiO-SiO2 multilayer granular films showing high resistivity and good magnetic properties were applied to the module. Inductance value increased about 30% by application of magnetic films, and occupation area and series resistance were also reduced by 20%. The obtained module size was 3.0 mm × 3.5 mm, which was much smaller than the conventional power amplifier module, since the bias circuit was formed on the same silicon substrate.

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Magnetics, IEEE Transactions on  (Volume:39 ,  Issue: 5 )