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A double-layered type film of glass/MgO 10 nm/Cr 70 nm/(Fe--Si 50 nm/Cr 10 nm)5/Fe-Si 50 nm/MgO 5 nm/(FePt 2 nm/Ag 5 nm)5 is synthesized on a glass substrate. The epitaxial growth in the film is preserved before and after annealing at 550°C for 1 h, resulting in L10 FePt with a  texture. The multilayer structure in the soft magnetic underlayer of (Fe--Si/Cr)5 contributes to the good epitaxial growth. The film of (FePt/Ag)5 shows FePt grains as small as 13 nm in size and a loop slope at coercivity α as small as 2 after anneal at 550°C for 1 h.