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A silicon microactuator using integrated microfabrication technology

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4 Author(s)
Y. Lu ; Data Storage Inst., Singapore ; J. P. Yang ; J. Chen ; S. X. Chen

The authors propose a new type of MEMS actuator which is suitable for integration with read/write (R/W) head and AlTiC slider in hard disk drives (HDDs). Double-sided wafer patterning and adhesive wafer bonding techniques are used in fabrication. The displacement stroke of the R/W head, which attached on the MEMS actuator, can reach ±0.5 μm when the input voltage is ±20 V. The dynamic performances of the MEMS actuator are simulated by the finite-element method.

Published in:

IEEE Transactions on Magnetics  (Volume:39 ,  Issue: 5 )