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A silicon microactuator using integrated microfabrication technology

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4 Author(s)
Lu, Y. ; Data Storage Inst., Singapore ; Yang, J.P. ; Chen, J. ; Chen, S.X.

The authors propose a new type of MEMS actuator which is suitable for integration with read/write (R/W) head and AlTiC slider in hard disk drives (HDDs). Double-sided wafer patterning and adhesive wafer bonding techniques are used in fabrication. The displacement stroke of the R/W head, which attached on the MEMS actuator, can reach ±0.5 μm when the input voltage is ±20 V. The dynamic performances of the MEMS actuator are simulated by the finite-element method.

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Magnetics, IEEE Transactions on  (Volume:39 ,  Issue: 5 )