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A three-dimensional MEMS optical switching module having 100 input and 100 output ports

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7 Author(s)
Yamamoto, T. ; NTT Microsystem Integration Labs., Nippon Telegraph & Telephone Corp., Kanagawa, Japan ; Yamaguchi, J. ; Takeuchi, N. ; Shimizu, A.
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This paper describes an optical switching module based on microelectromechanical systems (MEMS) two-axis tilt mirror arrays and low-cost highly accurate free-space optics. The MEMS mirror arrays are integrated on single-crystal silicon wafers and provide reliable switching operation at a low driving voltage. The free-space optics consists of two-dimensional optical fiber and microlens arrays based on low-cost and highly accurate polymer-based components. They provide a compact switching module (approximately 80/spl times/60/spl times/35 mm [170 cc]) and are assembled passively by using dowel pins. A prototype switch module with 100-ch optical fiber I/O has a low coupling loss of 4.0 dB, a low crosstalk within -60 dB, and switching time of 3 ms.

Published in:

Photonics Technology Letters, IEEE  (Volume:15 ,  Issue: 10 )

Date of Publication:

Oct. 2003

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