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Broadband impedance characterization of high dielectric constant (high-k) films was performed using a coaxial test fixture configuration. The presented coaxial test fixture and broadband measurement methodology of impedance for high-k films minimizes systematic uncertainties by reducing the interconnection inductance and improving the calibration procedure. In the APC-7 configuration, the technique enables accurate evaluation of impedance at frequencies of 100 MHz to 10 GHz with resolution of 0.01 Ω. The electrical characteristic of high-k films was found to be consistent with a capacitive load without significant contribution from the circuit inductance that typically dominates the high-frequency response. The experimental data and numerical simulations showed that high-k organic-ceramic composite materials could considerably suppress resonant behavior of the power-ground planes. It was found that high-k organic resins filled with ferroelectric ceramic powders exhibit a high-frequency dielectric loss that increases with increasing volume fraction of the ceramic component. The dielectric dispersion and the corresponding dielectric loss of organic-ceramic hybrid materials can serve as an effective mechanism for suppressing the resonant standing waves in power-ground planes.