By Topic

Electron-beam-induced deposition of conductive nanostructures with carbon nanotube emitters

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Arai, F. ; Dept. of Micro Syst. Eng., Nagoya Univ., Japan ; Pou Liu ; Lixin Dong ; Nakajima, M.
more authors

Electron-beam-induced deposition (EBID) with two kinds of organometallic compounds including tungsten hexacarbonyle (W(CO)6) and dimethyl-gold ((CH3)2(C5H7O2)Au) as precursors is presented so as to obtain conductive nanostructures. Their resistivity and growth rate are measured, and the composition of deposits are analyzed. To improve the resolution of the deposit and energy consumption, EBID with multiwalled carbon nanotubes (MWNTs) as emitters is demonstrated. In the deposit at anode by using W(CO)6, mass of the tungsten reaches up to 80% among the compositions.

Published in:

Nanotechnology, 2003. IEEE-NANO 2003. 2003 Third IEEE Conference on  (Volume:2 )

Date of Conference:

12-14 Aug. 2003