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Ti(Ta)O/sub 2/ film fabricated by magnetron sputtering and plasma immersion ion implantation and deposition: comparative study

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7 Author(s)
Chen, J.Y. ; Sch. of Mater. Sci. & Eng., Southwest Jiaotong Univ., Chengdu, China ; Leng, Y.X. ; Yang, P. ; Wan, G.J.
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Summary form only given, as follows. High performance hemocompatible materials have become the subject of increasing research in recent years. Specific kinds of surface modification are being developed as increasingly effective methods for improving the multi-functionality of devices, while obviating the need for high cost and long development times. As an effective method, plasma-based deposition of thin film materials has been applied to modify existing metallic biomaterials such as stainless steel, cobalt alloy and titanium, which have been applied as substrate materials for stents and mechanical heart valves, etc. The work described focuses on the comparison of the characteristics and properties of a new doped titanium dioxide film deposited using two different plasma-based deposition methods.

Published in:
Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. The 30th International Conference on

Date of Conference: 5-5 June 2003

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