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Summary form only given, as follows. Recently, applicability of an atmospheric pressure plasma to the flat panel display, (FPD) fabrication processes has been studied. The issues include damages of metal patterns formed on glass substrates caused by intense electric field around the discharges, as well as a problem of the production of stable discharges suitable, for the large-area glass processings. In this study, we investigate the discharge characteristics of an atmospheric pressure plasma and its effects on the electrical damages to the metal-patterned glass.
Date of Conference: 5-5 June 2003