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Characteristics of an atmospheric pressure plasma and its application to FPD fabrication processes

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3 Author(s)
Jae Hwack Pyo ; SE Plasma Inc., Kyunggi, South Korea ; Yoon-Suk Oh ; Tae Ki Lee

Summary form only given, as follows. Recently, applicability of an atmospheric pressure plasma to the flat panel display, (FPD) fabrication processes has been studied. The issues include damages of metal patterns formed on glass substrates caused by intense electric field around the discharges, as well as a problem of the production of stable discharges suitable, for the large-area glass processings. In this study, we investigate the discharge characteristics of an atmospheric pressure plasma and its effects on the electrical damages to the metal-patterned glass.

Published in:

Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. The 30th International Conference on

Date of Conference:

5-5 June 2003