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A new method for fluid simulation of high-density plasma discharge

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3 Author(s)
Choe, H. ; Samsung Electron. Co. Ltd, Gyeonggi, South Korea ; Kim, S.S. ; Yoon, N.S.

Summary form only given, as follows. To overcome the time step limitation in fluid simulation of high-density plasma discharge, an unconditionally stable algorithm that is applicable to J/sub tot/(=J+[1/4/spl pi/][/spl part/E//spl part/t])=0 case is proposed [H. Choe et al., J. Comp. Phys. 170, 550 (2001)]. In this article, we extend the algorithm to J/sub tot//spl ne/0 case. To examine the effectiveness of new algorithm, we applied the new method to J/sub tot//spl ne/0 case. The results indicate that the newly developed algorithm successfully overcome the time step limitation.

Published in:

Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. The 30th International Conference on

Date of Conference:

5-5 June 2003