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Summary form only given, as follows. The characteristics of DBD plasma were studied using optical emission spectroscopy (OES) and electrical signals of discharge with various flow-rate of oxygen. The diameter of copper electrode was 50 mm, the thickness of dielectric barrier was 3 mm and the distance of electrode was 2 mm. The O/sub 2/ flow-rate varied from 0 to 50 LPM. The OES was measured intensity of the each elements generated in the plasma. The square pulses with 1/spl sim/4.5kHz were applied to DBD reactor.