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Study of an atmospheric-pressure dielectric barrier discharge developed for large area material processing

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4 Author(s)
Se Youn Moon ; Dept. of Phys., Korea Adv. Inst. of Sci. & Technol., Daejon, South Korea ; Kang, B.K. ; Lee, Y.K. ; Choe, W.

Summary form only given, as follows. An atmospheric-pressure dielectric barrier discharge plasma source was developed aiming for large-area surface treatment of various materials. The plasma is generated using a 13.56 MHz RF source and its dimension is approximately 200 mm /spl times/ 20 mm In order to enhance the processing efficiency, double structure electrodes and dielectricws are constructed. Using electrical and optical methods, important plasma parameters were measured along the length direction of the plasma.

Published in:

Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. The 30th International Conference on

Date of Conference:

5-5 June 2003