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Summary form only given, as follows. In the last 30 years, a wide range of diagnostic techniques has been developed for discharge and plasma study. These include electric and magnetic probes, optical fiber sensors, optical and mass spectroscopy, laser scattering, optical and microwave interferometer, and schlieren analysis. However, most of these measuring techniques have limitation with either their range of application, their spatial resolution or their disturbance of the discharge environment. Spectral data used for diagnosing plasma is one of the simplest and the most useful methods because of its high resolution and indirect-contact in measurement.