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Efficient mixed-domain analysis of electrostatic MEMS

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2 Author(s)
Gang Li ; Dept. of Mech. & Ind. Eng., Univ. of Illinois, Urbana-Champaign, IL, USA ; N. R. Aluru

We present efficient computational methods for scattered point and meshless analysis of electrostatic microelectromechanical systems (MEMS). Electrostatic MEM devices are governed by coupled mechanical and electrostatic energy domains. A self-consistent analysis of electrostatic MEMS is implemented by combining a finite cloud method-based interior mechanical analysis with a boundary cloud method (BCM)-based exterior electrostatic analysis. Lagrangian descriptions are used for both mechanical and electrostatic analyses. Meshless finite cloud and BCMs, combined with fast algorithms and Lagrangian descriptions, are flexible, efficient, and attractive alternatives compared to conventional finite element/boundary element methods for self-consistent electromechanical analysis. Numerical results are presented for MEM switches, a micromirror device, a lateral comb drive microactuator, and an electrostatic comb drive device. Simulation results are compared with experimental and previously reported data for many of the examples discussed in this paper and a good agreement is observed.

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IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems  (Volume:22 ,  Issue: 9 )