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Piezoelectric polyimide tactile sensors

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6 Author(s)
Atkinson, G.M. ; Virginia Commonwealth Univ., Richmond, VA, USA ; Pearson, R.E. ; Ounaies, Z. ; Park, C.
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An important application of piezoelectric materials is for tactile sensing. For non-planar applications, polymer materials offer the potential to provide flexible tactile sensors conforming to a variety of surface geometries. We have demonstrated a fabrication process for fabricating MEMS tactile sensor structures using a novel high-temperature piezoelectric polyimide as the sensing material. The process consists of conventional lithography and metallization processes and uses a sacrificial layer of photoresist. Electrodes are fabricated on the upper and lower surfaces of the suspended bridge and cantilever structures and a self-test electrode is fabricated underlying each suspended component for testing. Prototype structures have been fabricated on silicon substrates for the purposes of process demonstration and characterization.

Published in:

University/Government/Industry Microelectronics Symposium, 2003. Proceedings of the 15th Biennial

Date of Conference:

30 June-2 July 2003