By Topic

A lecture and hands-on laboratory course: introduction to micromachining and MEMS

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Judy, J.W. ; Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA ; Motta, P.S.

A 10-week course on micromachining and microelectromechanical systems (MEMS) technologies has been designed and taught that incorporates both a lecture component (3 hours/week) and a hands-on laboratory component (4 hours/week). By completing this course the students gain an understanding and hands-on experience with photolithography, isotropic and anisotropic wet etching, dry etching, physical and chemical vapor deposition, electroplating, metrology, statistical design of experiments, MEMS release etching, stiction, and MEMS device testing. The layout of the course chip enables students to produce over 100 different devices using both bulk micromachining and surface micromachining. The layout of the chip includes microsensors (accelerometers, pressure sensor, resonant magnetometers), microactuators (torsional magnetic microactuators, optical switches, thermal microactuators), and microstructures (cantilever beams, bridges, neural probes, needles, thin-film stress test structures, bulk micromachining test structures, electrical test structures). This course prepares students to be active participants in the growing MEMS and microsystems industry.

Published in:

University/Government/Industry Microelectronics Symposium, 2003. Proceedings of the 15th Biennial

Date of Conference:

30 June-2 July 2003