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Modeling of multiple-unit thermal sensor of small heat flux

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3 Author(s)
Birman, Y.V. ; Novosibirsk State Tech. Univ., Russia ; Lobach, O.V. ; Dikareva, R.P.

In this article, the principles of measurement of heat flux are considered. A model of a small heat flux multiple-unit sensor is constructed and the temperature distribution in a sensor structure are calculated.

Published in:

Electron Devices and Materials, 2003. Proceedings. 4th Annual 2003 Siberian Russian Workshop on

Date of Conference:

1-4 July 2003