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Energy spread measurement of electrons from field emitter array for ion beam neutralization

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10 Author(s)
Ishikawa, J. ; Dept. of Electron. Sci. & Eng., Kyoto Univ., Japan ; Gotoh, Y. ; Nakamura, K. ; Tsuji, H.
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In this paper, the use of a field emitter array as an electron source for the charge neutralization of ion beam was proposed. Si was preferred as an emitter material because minimum contamination was expected for the preparation of silicon devices such as LSI. The energy spread of the extracted electrons from electron source were measured.

Published in:

Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International

Date of Conference:

7-11 July 2003