Referenced Items are not available for this document.
We have fabricated Spindt-type gated field emission arrays with vertically aligned CNTs emitters. A detailed fabrication process together with the growth and characterization of the aligned carbon nanotubes will be presented and discussed.
Published in:
Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International
Date of Conference: 7-11 July 2003
- Page(s):
- 257 - 258
- Print ISBN:
- 4-8181-9515-4
- INSPEC Accession Number:
- 7860756
- Digital Object Identifier :
- 10.1109/IVMC.2003.1223081
- Product Type:
- Conference Publications
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