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Fabrication of gated field emission arrays with aligned carbon nanotubes

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5 Author(s)
M. Q. Ding ; Beijing Vacuum Electron. Res. Inst., China ; Xinghui Li ; Guodong Bai ; Fuquan Zhang
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We have fabricated Spindt-type gated field emission arrays with vertically aligned CNTs emitters. A detailed fabrication process together with the growth and characterization of the aligned carbon nanotubes will be presented and discussed.

Published in:

Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International

Date of Conference:

7-11 July 2003