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Low temperature growth of carbon nanotube emitters on silicon substrates and ITO glass

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7 Author(s)
S. P. Chen ; Innovative Energy Technol. Div., Ind. Technol. Res. Inst., Hsinchu, Taiwan ; C. C. Chuang ; K. W. Cheng ; T. W. Huang
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In this study, the carbon nanotube emitters have been successfully synthesized over two dimensional Ni-patterned silicon substrates and ITO coated glass. We used the microwave plasma enhanced chemical vapor deposition (MPECVD) process to fabricate the carbon nanotube emitters.

Published in:

Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International

Date of Conference:

7-11 July 2003