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Low temperature growth of carbon nanotube by thermal CVD with FeZrN catalyst

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6 Author(s)
Shiroishi, T. ; Mitsubishi Electr. Corp., xxxx, Japan ; Sawada, T. ; Hosono, A. ; Nakata, S.
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In order to make carbon nanotubes grow, the catalyst film that is deposited on the substrate must be transformed into fine particles. However, it is difficult to transform the catalyst film into fine particles at low temperature. A method in which the etching gas is used to transform the catalyst film into fine particles has been reported. However, because the NH/sub 3/ is harmful, expensive gas removal equipment has to be prepared. We achieved the growth of carbon nanotubes on soda lime glass at low temperature (under 550 C) by the use of a novel catalyst, FeZrN, without the etching gas.

Published in:

Vacuum Microelectronics Conference, 2003. Technical Digest of the 16th International

Date of Conference:

7-11 July 2003

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