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Real case studies of fast wafer level reliability (FWLR) EM test as process reliability monitor methodology

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6 Author(s)
A. K. L. Yap ; Chartered Semicond. Manuf. Ltd., Singapore, Singapore ; T. W. H. Ling ; H. K. Yap ; B. H. Lim
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In this paper, we present real case studies to illustrate SWEAT and ISOT EM tests effectiveness as reliability screens and monitoring methodology.

Published in:

Physical and Failure Analysis of Integrated Circuits, 2003. IPFA 2003. Proceedings of the 10th International Symposium on the

Date of Conference:

7-11 July 2003