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Novel VOA using in-plane reflective micromirror and off-axis light attenuation

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3 Author(s)

A new off-axis light attenuation configuration combining with a movable reflective micromirror is proposed for variable optical attenuator (VOA) application. Comprehensive study of new comb drive actuators of a two-step structure is done to achieve large displacement of an actuated micromirror for VOA. The measured optical and electrical performances have proven this new design promising for practical applications.

Published in:

Communications Magazine, IEEE  (Volume:41 ,  Issue: 8 )

Date of Publication:

Aug. 2003

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