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Proceedings International Conference on MEMS, NANO and Smart Systems

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The following topics were dealt: MEMS fabrication; shape memory alloys; laser micromachining for microfluidic, microelectronic and MEMS applications; micromachined needles for drug delivery systems; finite element simulation; magnetically levitated microrobots.

Published in:

MEMS, NANO and Smart Systems, 2003. Proceedings. International Conference on

Date of Conference:

23-23 July 2003