By Topic

Self-consistent particle-in-cell/Monte Carlo simulation of RF magnetron discharges of oxygen/argon mixture: effects of partial pressure ratio

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Yonemura, Shigeru ; Inst. of Fluid Sci., Tohoku Univ., Sendai, Japan ; Nanbu, Kenichi

The characteristics of RF planar magnetron discharges of O2/Ar mixture are clarified using the particle-in-cell/Monte Carlo method. The simulation is carried out for axisymmetrical magnetic fields. The spatial and temporal behavior of magnetron discharge is examined in detail. The O- ions are trapped in the plasma bulk by the time-averaged potential. The O- density is governed by a balance of generation and loss of O-. The positive ions Ar+, O2+, and O+ are distributed in such a way that the charge neutrality is kept in the plasma bulk. Since the peak point of O- density does not coincide with that of electron density, the spatial distributions of Ar+, O2+, and O+ have two peaks. The number densities of Ar+ and O- ions drastically increase when oxygen is added to the discharge gas Ar, and then saturated. In the case when the mole fraction of oxygen increases, the self-bias voltage on the target decreases. This phenomenon is investigated in detail and a clear physical explanation is presented.

Published in:

Plasma Science, IEEE Transactions on  (Volume:31 ,  Issue: 4 )