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Design of a Lagrangian relaxation-based hierarchical production scheduling environment for semiconductor wafer fabrication

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2 Author(s)
Ting-Kai Hwang ; Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei, Taiwan ; Chang, S.-C.

This paper describes the design of a two-level hierarchical production scheduling engine, which captures the industrial practice of mass production semiconductor fabrication factories (fabs). The two levels of the hierarchy consist of a mid-term scheduler and a short-term scheduler, and are aimed at achieving coordination between the fab-wide objectives and local shop-floor operations. The mid-term scheduler maximizes weighted production flow to reduce the fab-wide cycle time and ensure on-time delivery by properly setting daily production target volumes and reference work-in-process (WIP) levels for individual part types and stages. Mid-term scheduling results are further broken down into more detailed schedules by the short-term scheduler. In addition to the same set of operational constraints in mid-term scheduling, the short-term scheduler includes the consideration of batching effects. It maximizes weighted production flow while tracking the daily production targets and the reference WIP levels specified by mid-term scheduling. The schedulers adopt a solution methodology with three ingredients; the Lagrange relaxation approach, network flow optimization, and Frank-Wolfe method. The scheduling tool is reasonably efficient in computation.

Published in:

Robotics and Automation, IEEE Transactions on  (Volume:19 ,  Issue: 4 )

Date of Publication:

Aug. 2003

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