By Topic

Design of a Lagrangian relaxation-based hierarchical production scheduling environment for semiconductor wafer fabrication

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Ting-Kai Hwang ; Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei, Taiwan ; Chang, S.-C.

This paper describes the design of a two-level hierarchical production scheduling engine, which captures the industrial practice of mass production semiconductor fabrication factories (fabs). The two levels of the hierarchy consist of a mid-term scheduler and a short-term scheduler, and are aimed at achieving coordination between the fab-wide objectives and local shop-floor operations. The mid-term scheduler maximizes weighted production flow to reduce the fab-wide cycle time and ensure on-time delivery by properly setting daily production target volumes and reference work-in-process (WIP) levels for individual part types and stages. Mid-term scheduling results are further broken down into more detailed schedules by the short-term scheduler. In addition to the same set of operational constraints in mid-term scheduling, the short-term scheduler includes the consideration of batching effects. It maximizes weighted production flow while tracking the daily production targets and the reference WIP levels specified by mid-term scheduling. The schedulers adopt a solution methodology with three ingredients; the Lagrange relaxation approach, network flow optimization, and Frank-Wolfe method. The scheduling tool is reasonably efficient in computation.

Published in:

Robotics and Automation, IEEE Transactions on  (Volume:19 ,  Issue: 4 )