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Using yield models to accelerate learning curve progress [semiconductor industry]

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2 Author(s)
D. Dance ; SEMATECH, Austin, TX, USA ; R. Jarvis

Worldwide competitive pressure is driving successful semiconductor companies toward ever improving performance-price ratios. In addition, this pressure is accelerating the rate of performance-price improvement. Using yield models can accelerate the rate at which processing experience reduces manufacturing costs. This paper reviews learning curves, outlines an improvement strategy using yield models, presents enhancements, and illustrates an application of yield models to accelerate learning. Detailed, validated models can simulate the yield effects of process and equipment improvement plans. Yield models, used with short-loop defect monitors, allow rapid feedback of experimental results to yield improvement efforts by compressing normal processing cycle times

Published in:

IEEE Transactions on Semiconductor Manufacturing  (Volume:5 ,  Issue: 1 )