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A surface micromachined optical scanner array using photoresist lenses fabricated by a thermal reflow process

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4 Author(s)
Toshiyoshi, H. ; Inst. of Ind. Sci., Univ. of Tokyo, Japan ; Su, G.-D.J. ; LaCosse, J. ; Wu, M.C.

This paper presents the design, fabrication, and operation of a newly developed micromechanical optical scanner array using a translating microlens. We have used photoresist reflow technique to form a microlens on a surface micromachined XY-stage of the scratch-drive actuation mechanism. The lens scanner is placed at the focal length from an incident optical fiber to collimate the transmitting light. The collimated beam is steered two-dimensionally by the XY-motion of the microlens with respect to the incident fiber. We also have developed a theoretical model to predict appropriate initial resist thickness and diameter for the scanning lens. An optical scanning angle of ±7° has been demonstrated by sliding a microlens of 670-μm focal length at a physical stroke of ±67 μm. Typical angular positioning resolution has been estimated to be 0.018°.

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Lightwave Technology, Journal of  (Volume:21 ,  Issue: 7 )