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Virtual production lines design for back-end semiconductor manufacturing systems

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3 Author(s)
Ying Tang ; Dept. of Electr. & Comput. Eng., Rowan Univ., Glassboro, NJ, USA ; MengChu Zhou ; Qiu, R.G.

This paper introduces the virtual production line (VPL) concept, which initiates a new method to model the shop floor from both control and management point of view. Heuristic algorithms are presented to dynamically configure a large system into many VPLs, which ensure the line balance and efficiency, and accurately predicate the completion time for each work-order. The proposed methodology and algorithms are demonstrated through a simplified back-end semiconductor manufacturing system.

Published in:

Semiconductor Manufacturing, IEEE Transactions on  (Volume:16 ,  Issue: 3 )