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Metal-organic vapor phase epitaxy for the mass production of novel semiconductor devices

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1 Author(s)
Schulte, B. ; AIXTRON AG, Aachen, Germany

We report on growth results achieved in AIXTRON multiwafer planetary reactors for the growth of phosphide-arsenide and nitride based novel semiconductor structures and devices. In case of the phosphide-arsenide based structures we focused on growth on 6-in GaAs wafers. Ga0.47InP layers were grown with standard deviations for the Ga-concentration of 0.75% and 0.3% on wafer and wafer-to-wafer, respectively. We attribute this result to the excellent temperature homogeneity of 1°C throughout the reactor. This factor also plays a role in the deposition of nitride-based semiconductors that was investigated for the growth of InGaN multiquantum wells for the blue (472 nm) and green (522 nm) wavelengths. Wafer-to-wafer wavelength distributions of max-min of ±2.1 nm (blue) and ±4.2 nm (green) were achieved. On wafer standard deviations of the wavelength fell in the range of 1.6-1.7 nm, respectively.

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Semiconductor Manufacturing, IEEE Transactions on  (Volume:16 ,  Issue: 3 )