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A 16-bit mixed-signal microsystem with integrated CMOS-MEMS clock reference

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7 Author(s)
Senger, R.M. ; Dept. of Electr. Eng. & Comput. Sci., Michigan Univ., Ann Arbor, MI, USA ; Marsman, E.D. ; McCorquodale, M.S. ; Gebara, F.H.
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In this work, we report on an unprecedented design where digital, analog, and MEMS technologies are combined to realize a general-purpose single-chip CMOS microsystem. The convergence of these technologies has enabled the development of a low power, portable microinstrument ideally suited for controlling environmental and bio-implantable sensors.

Published in:

Design Automation Conference, 2003. Proceedings

Date of Conference:

2-6 June 2003