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The (Sr1-xCax)TiO3 (SCT) thin films are deposited on Pt-coated electrode (Pt/TiN/SiO2/Si) using RF magnetron sputtering method. The structural and electric properties of SCT thin films were influenced with substitutional contents of Ca. The composition of SCT thin films were closed to stoichiometry (1.081∼1.17 in A/B ratio). The maximum dielectric constant of thin film is obtained by annealing at 600[°C] of SCT15 thin film. The capacitance characteristics had a stable value below ±5[%]. All SCT thin films used in this study show the phenomena of dielectric relaxation with the increase of frequency, and the relaxation frequency is observed above 200[kHz]. In addition, leakage current increases and breakdown field decreases as a function of deposition temperature.