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Variable RF MEMS capacitors with extended tuning range

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5 Author(s)
De Coster, J. ; Dept. of Electr. Eng., K.U. Leuven, Netherlands ; Puers, R. ; Tilmans, H.A.C. ; van Beek, J.T.M.
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Three distinct designs of variable RF MEMS capacitors are presented and a comparison is made in terms of their continuous tuning range. Among these designs are the classical parallel-plate capacitor, as well as the so-called two-gap structure and a novel device with torsion-beam suspensions and double actuation. This allows the capacitance to be tuned over a larger range compared to a single-driven device. As a result of this, the tuning range of the device exceeds the theoretical 50%-limit for parallel-plate capacitors. The tuning ranges of all three devices have been determined experimentally and were found to be 39% for the parallel-plate capacitor, 310% for the two-gap structure and 61% for the torsion-suspension device. The measured tuning voltages are 17 V, 22 V and 11 V respectively.

Published in:

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003  (Volume:2 )

Date of Conference:

8-12 June 2003