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Tunable external-cavity laser using MEMS technology

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6 Author(s)
X. M. Zhang ; Sch. of Electr. & Electron. Eng., Nanyang Technol. Univ., Singapore ; A. Q. Liu ; D. Y. Tang ; C. Lu
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This paper reports a tunable external-cavity diode laser using a MEMS curved mirror fabricated on a silicon-on-insulator (SOI) wafer. In addition to the many advantages coming with the MEMS technology, this laser has the benefits of low alignment requirement, easy integration/packaging and potentially large wavelength tuning range. It has a size of 1.5 mm/spl times/1 mm (not including the optical fiber), and obtains a wavelength tuning range of 10.6 nm. The output power is about 5 mW at 40 mA injection current (I/sub th/ = 26 mA).

Published in:

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003  (Volume:2 )

Date of Conference:

8-12 June 2003