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Measuring the optical and electromechanical properties of MEMS mirrors

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3 Author(s)
Reznichenko, Y. ; Micromachined Product Div., Analog Devices Inc., Cambridge, MA, USA ; Judy, M. ; Sam Zhang

We present a new measurement system that can determine the optical and electromechanical characteristics of MEMS mirrors. The angular measurement range is +/-5/spl deg/ in x direction and +/-4/spl deg/ in y direction with a resolution of 0.002/spl deg/. The system insertion loss and stability have been measured up to 10 hours with an averaging time of 100 ms. A maximum insertion loss of 75 dB can be measured. The measurement results of static voltage vs. angle response, long-term stability, package insertion loss and polarization dependent loss are presented. The static response data are further compared with modeling results. The average error between measured and simulated angle at a given voltage is less than 3%. Integrated with a closed-loop nonlinear controller, the system can also be used to measure the mirror tilt angle as a feedback sensing signal for precise angular positioning controls.

Published in:

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003  (Volume:2 )

Date of Conference:

8-12 June 2003

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