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Resonant microstructures can be used as chemical microsensors, by adding a sensitive coating to the device structure. Those vibrating structures are sensitive to the coating mass changes which modify the natural resonant frequency. The sensitivity, key parameter of such sensor, is proportional to the resonant frequency. But, if detection method consists in frequency measurement with a ring oscillator, the noise signal must be taken into account. A large study of these reflections, combined with a signal to noise ratio optimization, leads us to maximize quality factor to microstructure thickness ratio.
TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003 (Volume:2 )
Date of Conference: 8-12 June 2003