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Development of a multi-modal, flexible tactile sensing skin using polymer micromachining

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3 Author(s)
Engel, J. ; Micro & Nanotechnol. Lab., Illinois Univ., Urbana, IL, USA ; Chen, J. ; Chang Liu

Inspired by the superior functionality of biological skin, we report a first multi-modal, flexible, and robust tactile sensing skin based on polymer substrates. The demonstrated device successfully incorporates multiple sensor modalities into a compact "node" for evaluating contact forces and film curvature, as well as the relative hardness, thermal conductivity, and temperature of the contacted object. Sensing is accomplished via thin film metal gold heaters, nickel RTDs (Resistance Temperature Device), and NiCr (nichrome) strain gauges. Built on a micromachined polyimide (DuPont Kapton HN200) film, the sensors provide qualitative measurements of contact object properties. Experimental characterization of the sensors' performance presented.

Published in:

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003  (Volume:2 )

Date of Conference:

8-12 June 2003

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