Skip to Main Content
This paper describes process development, fabrication and testing of piezoelectric micro actuators based on a novel polymer-composite technology. Fabrication is done by using segmented silicone molds for the insert-casting of piezoactuators into polymeric material. Furthermore, a simulation model was developed to forecast the principal behavior of the micro actuators and to perform an optimization of the stroke. Based on these results, a number of test structures were fabricated. Finally the displacement was measured and compared to the simulation model.