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Composite photopolymer microstructures: from planar to 3D devices

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4 Author(s)
Renaud, P. ; Microsyst. Lab., Ecole Polytech. Fed. de Lausanne, Switzerland ; Metz, S. ; Jiguet, S. ; Bertsch, A.

In this paper, a survey is made of some technologies in which the photo-definable polymer is used as structural material and where physical properties of polymers are modified to change porosity, mechanical or electrical properties. The paper is organized in three sections: (a) 2D, multilayer photopolymers, (b) High aspect ratio and (c) 3D micro-stereolithography technologies. In addition the authors mention some development in which photo-polymerization is used to locally create special structures.

Published in:

TRANSDUCERS, Solid-State Sensors, Actuators and Microsystems, 12th International Conference on, 2003  (Volume:2 )

Date of Conference:

8-12 June 2003